Pegasus™ S series wafer probers feature a precision stage for fine resolution and repeatable accuracy. The modular design accommodates a wide range of productivity enhancing and field upgradeable options to ensure capabilities can be extended to suit future requirements.

Probing is accomplished with either cantilever probe cards or micromanipulators, for example the Pegasus™ probe, a fully adjustable manual manipulator with built-in height detection, edge sensing, quick needle replacement and adjustable gram force setting. In addition, a variety of standard and custom chuck plates are available for a wide range of applications.

The Pegasus™ S series stage mechanism, microscope mount and multiple computer-aided probes can all be controlled with simple joystick action. They can also be operated using all industry accepted communications protocols.