SEMI-AUTOMATIC ANALYTICAL PROBE STATION FOR HIGH VOLTAGE PROBING
The S200FA-HV semi-automatic wafer prober addresses today’s power semiconductor test
challenges by delivering accurate low contact resistance measurements even at high currents.
Based on our Pegasus™ FA series semi-automatic wafer probers, it is ideally suited for testing power devices and can be easily integrated with a wide range of tester instruments. The Pegasus™ S200FA-HV platform provides a flexible on-wafer probing solution focused on high-power semiconductor characterization.
ideal for testing power devices
- High current probing for DC and pulsed
- Kelvin sense measurements (source & chuck)
- Low CRes reverse side contact (drain/source)
- Suitable for handling thin wafers
- Low leakage/high voltage
- Safety for high current/high voltage measurements
Pegasus™ S200FA-HV brochure
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high voltage accessories
Thanks to Kelvin chuck solutions the S200FA-HV achieves low contact resistance measurements in the milliohm range even at high currents.
Wentworth’s Pegasus™ S200FA-HV analytical prober can be configured with either high voltage/high current (HV/HC) probe holders or use dedicated HV/HC current probe card solutions.
Dedicated HV and HC probes reduce probe and device destruction at high voltages/currents by preventing arcing at the tip.
Our high current probe cards (up to 200 A pulsed) handle and distribute high current loads. They use a special surface mount atmospheric chamber to protect against ‘arcing’ or ‘flash over’. Thanks to the use of high temperature probe card materials, testing can be performed over a wide temperature range without the need to change the set up.
Guardmaster and Microaccess
The GuardMaster™ enclosure surrounds the chuck and wafer stage, shielding it and the probes from both EMI and light. The microaccess top hat completes the EMI/dark shielding allowing the probes and optics to be inserted into the probing environment while maintaining controlled probing conditions. Features include:
- Maintains environmental conditions while probing
- Provides access for microscope objectives maintaining X,Y & Z manoeuvrability
- Allows full control/access to probe manipulators
- Can be used with up to eight manipulators and/or interchangeable probe cards
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