PEGASUS™ M200FA & M300FA
Manual analytical probe stations for 200 mm and 300 mm wafers
Wentworth’s manual FA series wafer probers M200FA and M300FA enable you to quickly obtain accurate measurements. At the core of this series is a highly stable, feature-laden platform to capture repeatable, precision measurements.
M200FA and M300FA manual analytical wafer probers for 200 mm and 300 mm wafers, deliver cost-effective probing for failure analysis, device characterization and inline process verification of wafers or packaged devices for semiconductor, research and education.
The compact design and extensive features are ideally suited for diverse applications, including small geometry probing, applications using high power optics, design debug, wafer level reliability (WLR) and electro static discharge (ESD).
Utilizing either Wentworth replaceable probes or DC cantilever probe cards, FA series wafer probers are an ideal platform for a variety of test applications.
Key Features
- Pegasus™ M200FA supports full and partial wafers to 200 mm
- Pegasus™ M300FA supports full and partial wafers to 300 mm
- Robust, highly stable platform for reliable and repeatable sub-micron probing
- Temperature probing from -60°C to +400°C
- Front facing controls with fine and coarse adjustment
- Large area platen with height adjustment and gross lift
- Fine lift chuck mechanism
WIDE RANGE OF APPLICATIONS
- Failure analysis
- Design verification
- Thermal characterization
- Parametric testing (DC to low level)
- Ideal for high power and ultra fast I.V./C.V. probing
Design and controls
Ergonomic design and controls make the manual FA series wafer probers extremely user friendly. Controls conveniently located at the front of the system, offer fine and coarse positioning of the XY stage. The Z control of the platen is also situated at the system front, offering variable Z movement as well as fine control for substrate probing.
The precision XY stage features lead screws with linear rails to deliver repeatable accuracy over a wide temperature range using our exclusive calibration process.
A robust microscope bridge supports a choice of different stereo zoom and high-powered microscopes.
configuration options
M200FA and M300FA wafer probers can be configured with a guarded light-tight environmental chamber (GuardMaster™ or ShieldMaster™) to provide operator protection, prevent frosting at low temperatures, enable low-level leakage or provide EMC shielding (GuardMaster™ only).
The M200FA and M300FA probers offer easy setup, positioning and adjustment of manipulators. In addition to manipulators, the probers’ robust, stable probing platform accepts a wide range of accessories, including standard and custom chuck plates, manual microscope mounts, microscopes from leading optics manufacturers, micromanipulators, needle holder assemblies, anti-vibration tables and many more.
PROBER ACCESSORIES
Manipulators & Front Ends
Enclosures & Antivibration Tables
Prober Control Software
Chucks
Probe Card Holders
Optics & Lasers
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