ENVIRONMENTAL ENCLOSURES
The environment around your wafer prober can often affect your test results. We offer different enclosures to neutralise the environment – which could be natural or electrical – to ensure test results can be verified. In some cases the environment is required to protect the operator, as well as the test result.
Specifically designed to complement our semi-automatic and manual FA Series probers, both the ShieldMaster™ and GuardMaster™ environmental chambers are also compatible with some of our production wafer prober models. Thanks to their smart design, they enable easy access for optics, manipulators and probe cards. When used with our semi-automatic FA series probe stations, the unique feature of an extended stage Y axis provides an uninhibited wafer loading position.
ShieldMaster™
ShieldMaster™ provides a localized enclosure, ideal for frost-free low temperature probing. The compact ergonomic design encloses the stage area of the wafer prober. It therefore allows the chuck chamber to be quickly purged with dry air or nitrogen to remove any residual moisture and prevent condensation build-up and water freezing in the probe environment. This provides a stable environment for accurate probing at below ambient and subzero temperatures.
A safety interlock breaks the electrical connections to prevent the operator to be exposed to high voltage or current.
GuardMaster™ EMC shielded enclosure
GuardMaster™ provides a combined EMC shielded and light-tight enclosure for low level measurements and frost-free low temperature probing. Using the same compact design as ShieldMaster™, it features all the same benefits plus the ability to carry out sensitive measurements in an electrically shielded environment. It is therefore ideal for any applications requiring low leakage measurements.
