Analytical Wafer Probers

Wentworth’s flagship analytical wafer probing platform, the Pegasus™ FA Series semi-automatic probers, bring speed, versatility, accuracy and dependability to a variety of wafer and package testing applications. Pegasus™ FA wafer probers utilize proprietary LabMaster™ control software, an intuitive graphics user interface for real-time monitoring of the probing set up and control of the prober’s accessories, as well as premium mapping capability and real-time yield analysis of the wafer and lot under test. When equipped with Pegasus™ submicron automated manipulators, Pegasus™ probers deliver ‘hands free’ debugging of devices on wafers up to 300mm. The Pegasus™ Series wafer probers deliver a host of other advanced accessories, including hot chucks, optics, lasers, and many others, offering customers a full turnkey solution.

Versatile

• Pegasus™ S200FA supports full and partial wafers to 200mm
• Pegasus™ S300FA supports full and partial wafers to 300mm
• Temperature ranges from -60°C to 300°C
• Support a wide range of cantilever probe cards
• Motorized and manually driven manipulators
• Programmable and manual microscope mounts
• Lasers for cutting and marking
• Temperature chuck plus a wide range of other accessories

Easy to Use

• Pegasus™ console with joystick and LCD monitor display features simple menus enabling the user to operate the prober with ease
• Optional LabMaster™ software enables the part time-to-advanced user to design sophisticated test routines
• LabMaster™ seamlessly integrates with leading testers while simultaneously communicating with all probe system accessories

Positioning Accuracy

Precision ball-screws and stepper motors deliver repeatable accuracy over a wide temperature range due to Wentworth's exclusive calibration process

Custom Solutions

Hardware and software solutions can be customized to your wafer prober / tester requirements

Wentworth M200FA manual analytical wafer prober for up to 200mm (8-inch) wafers delivers a cost-effective probe station for failure analysis, device characterization and inline process verification. Its compact design and extensive feature set are ideally suited for diverse applications, including: small geometry probing; applications using high power optics; design debug; wafer level reliability (WLR) and electro static discharge (ESD).

M200FA wafer prober can be configured with GuardMaster™, a guarded environmental chamber, to accommodate low-level and low temperature leakage testing. With controls conveniently located at the front of the system, the M200FA wafer prober offers fine and coarse positioning of the 8-inch x 12-inch XY stage. The Z control of the platen is also situated at the system front, offering variable Z movement as well as fine control for substrate probing.

M200FA wafer prober offers easy setup, positioning and adjustment of manipulators. M200FA wafer probers robust, stable probing platform accepts a wide range of accessories in addition to manipulators, including standard and custom chuck plates; manual, motorized or programmable microscope mounts; microscopes from leading optics manufacturers, needle holder assemblies, anti-vibration tables and more.

Wentworth’s M300FA manual wafer prober enables you to quickly obtain accurate measurements. At the core of M300FA wafer prober is a highly stable, feature-laden platform to capture repeatable, precision measurements. Ultilzing either Wentworth replaceable probes or DC cantilever probe cards the M300FA wafer prober is an ideal platform for a variety of test applications.

Ergonomic design and controls make the M300FA wafer prober is extremely user friendly. The M300FA wafer prober precision X / Y stage features lead screws with linear rails to deliver repeatable accuracy over a wide temperature range using our exclusive calibration process.

M300FA wafer prober offers easy setup, positioning and adjustment of manipulators. M300FA wafer prober robust, stable probing platform accepts a wide range of accessories in addition to manipulators, including: standard and custom chuck plates; manual, motorized or programmable microscope mounts; microscopes from leading optics manufacturers, anti-vibration tables and more.

Aspect L1 wafer prober is a versatile and economical solution for general diagnostic probing, engineering test and failure analysis of microcircuits on wafer substrates up to 200mm (8").

Aspect L1 wafer prober is rigidly constructed and compact platform is easily accessible and upgradeable. Fast probe mode is available in addition to either a high power or low power optics package. Aspect L1 wafer prober is designed to accept thermal chucks, and can simultaneously accommodate Wentworth PVX 400 manipulators and a probe card holder for Wentworth Cantilever Probe Cards

With its easily maintainable design and range of use, Aspect L1 wafer prober offers users the advantage of an economical manual prober with the ability to significantly enhance its performance.