Applications:

The Pegasus S200 DSP semi-automatic
prober delivers a robust solution for
double-sided probing of up to 8 inch
applications involving discrete power
semiconductors, MOSFET’s and IGBT
devices. It is also highly recommended
for test correlation or engineering design
teams working on the above device
types to minimize / eliminate chuck plate
influence from the test results.
The Pegasus S200 is compliant with
stringent EMC (Electro-Magnetic
Compatibility) directives – 89/336/EEC,
91/263/EEC, and 91/31/EEC – and is CE
certified.
Pegasus S200 platform can support ESD
wafer probing and achieves Class 3A
Human Body Model and Class M4
Machine Model as specified in SEMI
E129/1103.

Performance Benefits:

Fast - Simultaneous XY motion for
increased throughput
Accurate - Advanced controller software
addresses intrinsic stage errors
Easy-to-Use - Simple push-button control and
menu-driven operation
Versatile - Ideal for production probing,
especially LED and MEMS, and
characterization
Compatible - Interface compatibility with most
test environments
Robust - Reliable, heavy-duty performance
with chuck insulation up to 3KV
Easy Maintenance - System diagnostics for
easy and quick maintenance and repair
Performance Features:
• Simultaneous, double-sided probing of up
to 8-inch wafers
• “Real Time” operating system (OS9), for
easy tester integration
• TTL communications standard, Ethernet
(10 baseT), RS232 and IEEE488 optional
• Easy integration of cameras and
Wentworth LabMaster™ software
• Remote integrated keyboard with 1/4 VGA
display
• 17 additional axes available for auxiliary
control of probing accessories
• Covered stage assembly for protection
when working with fragile substrates
• Two-point wafer alignment