Applications:
The Pegasus S200 is specifically
designed for production probing
applications involving semiconductors,
LEDs and MEMS devices. It is also
highly recommended for characterization
applications and designed to handle 2” to
200mm full and partial wafers. Probing
may be done with either probe cards or
manipulators, both of which are also
available from Wentworth Laboratories.

The Pegasus S200 is compliant with
stringent EMC (Electro-Magnetic
Compatibility) directives – 89/336/EEC,
91/263/EEC, and 91/31/EEC – and is CE
certified.

Pegasus S200 can support ESD wafer
probing and achieves Class 3A Human
Body Model and Class M4 Machine
Model as specified in SEMI E129/1103.

Performance Benefits:

Fast - Simultaneous XY motion for
          increased throughput

Accurate - Advanced controller software
addresses intrinsic stage errors

Easy-to-Use - Simple push-button control and menu-driven operation

Versatile - Ideal for production probing,
especially LED and MEMS, and
characterization

Compatible - Interface compatibility with most test environments

Robust - Reliable, heavy-duty performance

Easy Maintenance - System diagnostics for
easy and quick maintenance and repair

Performance Features:

“Real Time” operating system (OS9), for easy tester integration

TTL communications standard, Ethernet (10
baseT), RS232 and IEEE488 optional

Easy integration of cameras and Wentworth
LabMaster™ software

Remote integrated keyboard with 1/4 VGA
display

17 additional axes available for auxiliary control of probing accessories

Covered stage assembly for protection when working with fragile substrates

Two-point wafer alignment