Applications:
The Pegasus 300S, is an economically priced, semi-automatic 300mm prober, specifically designed for semiconductor device and process characterization, parametric testing and failure analysis applications, and accommodates wafers from 2" up to 300mm, along with handling partial wafers.
Probing may be done with either probe cards or manipulators, both of which are also available from Wentworth Laboratories
The Pegasus 300S complies with stringent EMC (Electro-Magnetic Compatibility) directives – 89/336/EEC, 91/263/EEC and 91/31/EEC – and is CE certified. |
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Performance Benefits:
High Level Accuracy - Advanced controller software addresses intrinsic stage errors
Easy-to-Use - Simple push-button control and menu-driven operation
Versatile - Accomodates full and partial 2" - 300mm wafers
Compatible - Interface compatiblity with most test environments
Robust - Reliable heavy-duty performance
Easy Maintenance - System diagnostics for easy and quick maintenance and repair
Performance Features:
"Real Time" operating system (OS9), for easy tester integration
Compatible with industry-standard thermal chucks
Easy integration with high-end optics, laser systems, CCD cameras and Wentworth LabMaster™ software
Two-point wafer alignment
TTL communications standard, Ethernet (10 baseT), RS232 and IEEE488 optional
Remote integrated keyboard with 1/4 VGA display
16 additional axis for auxiliary control of probing accessories
Motorized platform allows for setting upper and lower safety limits for probe cards
Support for 4.5" - 6.0" probe cards |
