The Compass CMP 100 and CMP 300 are high precision tools for the build, repair and test of blade-style probe cards. Productivity-boosting Compass technology enables operators to assemble blades to the card, align the probes to the pads, planarize, “exercise” the card to duplicate production test, clean the probe tips, and accurately check the resistance of each probe.

Card assembly on the CMP 100/300 is accomplished after aligning the card in the holder. Probe card depth is set with a barrel micrometer and a probe is located onto the device pad using gripper arm XYZ controls. Device contact is registered on the CMP 100/300 by an eye-piece LED and/or an optional audible tone. The rapid pneumatic chuck drop and power lock feature on the freely rotating basket enable fast and accurate assembly of all remaining probes. The CMP 100/300 gripper arm assembly is easily removed on completion of probe assembly for ease of planarization.

The CMP100/300 chuck allows rapid adjustments to planarity, and permits the operator to obtain instant re-readings of card planarity.

The unique exercise function of the CMP 100/300 simulates use of the probe card under operating conditions. This simulation capability maximizes productivity by ensuring the production use of high quality probe cards. A final check prior to the card leaving the CMP 100/300 ensures that resistance is normal.

Features

• 144 light planarizer with digital planarization read-out
• Timer operated exercise cycle with 10 touchdowns/second
• 6-inch chuck with 2-inch XY stage adjustment and 20° theta (CMP 100)
• 3-inch x 4-inch vacuum zonable wafer chuck (CMP 300)
• Preset overdrive to accurately check probe alignment