AWP 2803 DSP

Semi-Automatic Prober

The AWP 2803 DSP, semi-automatic prober, is ideal for the simultaneous, dual-side probing of devices such as high-power MOSFETs. Based on Wentworth’s highly versatile AWP probe station platform, the AWP 2803 DSP delivers optimum probing performance for 3-inch to 6-inch wafers.

Designed for maintenance free, easy operation and simple field calibration, the AWP 2803 DSP employs a proprietary design to ensure complete electrical isolation to 3kV. Operators may readily access functions and settings, enter XY die sizes and automatically set a circular exclusion zone to probe a pre-determined area. The AWP 2803 DSP inking system may be retracted during load/unload and precisely positioned in XY and Z axes.

Complete integration with all tester configurations is assured using TTL, IEEE or RS232 interfaces.

Features

Small footprint
Remote keyboard - option
Ideal for low R_DS(ON) measurements
Top and bottom probe card – option
2 micron resolution
Programmable stage movement
CE certified

Technical Specifications:
AWP 2803 DSP

XY Stage

Type: High precision re-circulating ball screws

Stage Travel: 160mm x 160mm

Stage Speed: 95mm/sec

Resolution: 2µm

Motor Drive: Stepper motor

Z Travel: 10mm

Repeatability: ± 4µm

Accuracy: ± 7µm

Index Range: 10µm to 150mm in 2µm increment

Wafer Carrier: 75mm, 100mm, 125mm, 150mm

Caliper

Type: Stepper motor drive, programmable

Total Travel: 5mm (each jaw)

Caliper Speed: 60ms (this includes 10ms needle settling time)

Platform

Z Travel: 10mm vertical lift (factory set height)

Material: Anodized aluminum

Physical Dimensions – Base

Width: 620mm

Depth: 615mm

Weight: 45kg

Height at Optics: 400mm

Services

Electrical: 90–130VAC 50/60Hz
180–260VAC 50/60Hz

All specifications are subject to change without notice.
Rev 2.0 (5/3/01)



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