The APS 80 DSP, automatic double-sided prober for 2-inch to 6-inch wafers, is ideal for high volume, double-sided wafer applications such as power device production. User-friendly LabMaster™-derived system software delivers push button simplicity with a full complement of control parameters, including real-time yield analysis of both the wafer under test and the batch under test.
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The APS 80 DSP’s dual-end, parallel processing of wafers optimizes wafer handling for maximum throughput. Designed for easy access when manually loading and unloading wafers, the APS 80 DSP has a capacity of two cassettes, each containing 25 wafers. Featuring a highly advanced, single-stage wafer detection, pre-alignment and transportation system, the APS 80 DSP ensures long-term accuracy and repeatability.
The APS 80 utilizes sophisticated pattern recognition algorithms to enable repeatable alignment detection. Production-proven APS 80 DSP probing technology ensures continuous stepping reliability.
Features
- Simultaneous, double-sided probing of up to 6-inch wafers
- Powerful, user-friendly system software
- Planarization of needle sets and constant preset needle load
- Cognex pattern recognition system
- Genmark robot handling system
- Configurable to voltages in excess of 5kV for specialized applications
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