The APS 80, automatic prober for 2-inch to 8- inch wafers, is ideal for high volume, special handling applications such as GaAs, saw frames, ceramics and silicon. User-friendly LabMaster™-derived system software delivers push button simplicity with a full complement of control parameters, including real-time yield analysis of both the wafer under test and the batch under test.
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The APS 80’s dual-end, parallel processing of wafers optimizes wafer handling for maximum throughput. Designed for easy access when manually loading and unloading wafers, the APS 80 has a capacity of two cassettes, each containing 25 wafers. Featuring a highly advanced, single-stage wafer detection, pre-alignment and transportation system, the APS 80 ensures long-term accuracy and repeatability.
The APS 80 utilizes sophisticated pattern recognition algorithms to enable repeatable alignment detection. Production-proven APS 80 probing technology ensures continuous stepping reliability.
Features
- Full range of handling capabilities for a variety of materials
- Powerful, user-friendly system software
- Planarization of needle sets and constant preset needle load
- Cognex pattern recognition system
- Genmark robot handling system
- Configurable to voltages in excess of 5kV for specialized applications
- Programmable temperature option
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